High-performance ultralow dielectric constant carbon-bridged mesoporous organosilica films for advanced interconnects
2014 ◽
Vol 2
(32)
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pp. 6502-6510
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Mesoporous organosilica (MO) films are prepared using precursor 1,2-bis(triethoxysilyl)ethane (BTEE) and porogen template poly(ethylene oxide)–poly(propylene oxide)–poly(ethylene oxide) (P123).
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1992 ◽
Vol 28
(5)
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pp. 449-452
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1992 ◽
Vol 68
(4)
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pp. 243-259
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2000 ◽
Vol 278
(2)
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pp. 119-123
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2009 ◽
Vol 46
(4)
◽
pp. 397-404
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2001 ◽
Vol 244
(1)
◽
pp. 123-127
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