Preparation of porous silica films in a binary template system for double-layer broadband antireflective coatings

RSC Advances ◽  
2015 ◽  
Vol 5 (26) ◽  
pp. 20365-20370 ◽  
Author(s):  
Yuanyang Li ◽  
Haibing Lv ◽  
Longqiang Ye ◽  
Lianghong Yan ◽  
Yulu Zhang ◽  
...  
Keyword(s):  
Double Layer ◽  
Porous Silica ◽  
Wavelength Region ◽  
Antireflective Coatings ◽  
Silica Films ◽  
Layer Coating

The double-layer coating has high transmittances over a broad wavelength region.

A novel route to control refractive index of sol-gel derived nano-porous silica films used as broadband antireflective coatings

2000 ◽  
Vol 78 (2-3) ◽  
pp. 135-139 ◽  
Author(s):  
Guangming Wu ◽  
Jue Wang ◽  
Jun Shen ◽  
Tianhe Yang ◽  
Qinyuan Zhang ◽  
...  
Keyword(s):  
Refractive Index ◽  
Sol Gel ◽  
Porous Silica ◽  
Antireflective Coatings ◽  
Silica Films

Comparative Studies of Ultra Low-κ Porous Silica Films with 2-D Hexagonal and Disordered Pore Structures

2004 ◽  
Vol 812 ◽  
Author(s):  
Nobutoshi Fujii ◽  
Kazuhiro Yamada ◽  
Yoshiaki Oku ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
...  
Keyword(s):  
Pore Structure ◽  
Nonionic Surfactants ◽  
Porous Silica ◽  
Silica Film ◽  
X Ray Diffraction ◽  
Silica Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Porous Silica Film ◽  
Diffraction Peaks

AbstractPeriodic 2-dimensional (2-D) hexagonal and the disordered pore structure silica films have been developed using nonionic surfactants as the templates. The pore structure was controlled by the static electrical interaction between the micelle of the surfactant and the silica oligomer. No X-ray diffraction peaks were observed for the disordered mesoporous silica films, while the pore diameters of 2.0-4.0 nm could be measured by small angle X-ray scattering spectroscopy. By comparing the properties of the 2-D hexagonal and the disordered porous silica films which have the same porosity, it is found that the disordered porous silica film has advantages in terms of the dielectric constant and Young's modulus as well as the hardness. The disordered porous silica film is more suitable for the interlayer dielectrics for ULSI.

The effects of microstructure on optical and thermal properties of porous silica films

2017 ◽  
Vol 320 ◽  
pp. 174-177 ◽  
Author(s):  
Xinwen Zhang ◽  
Gaoling Zhao ◽  
Lingtong Zhan ◽  
Feng Zhan ◽  
Jianxun Wang ◽  
...  
Keyword(s):  
Thermal Properties ◽  
Porous Silica ◽  
Silica Films

Textural characterization of porous silica films prepared by the sol–gel process

2004 ◽  
pp. 227-231
Author(s):  
G. L. T. Nascimento ◽  
L. M. Seara ◽  
B. R. A. Neves ◽  
N. D. S. Mohallem
Keyword(s):  
Sol Gel ◽  
Porous Silica ◽  
Silica Films ◽  
Textural Characterization ◽  
Sol Gel Process

Modification of Porous Silica Antireflective Coatings with Fluorine-Containing Organosilicon

2009 ◽  
Vol 29 (6) ◽  
pp. 1719-1723 ◽  
Author(s):  
张清华 Zhang Qinghua ◽  
杨伟 Yang Wei ◽  
马红菊 Ma Hongju ◽  
马平 Ma Ping ◽  
许乔 Xu Qiao
Keyword(s):  
Porous Silica ◽  
Antireflective Coatings

PAN/PI functional double-layer coating for dendrite-free lithium metal anodes

2020 ◽  
Vol 8 (13) ◽  
pp. 6183-6189 ◽  
Author(s):  
Fei Shen ◽  
Kaiming Wang ◽  
Yuting Yin ◽  
Le Shi ◽  
Dingyuan Zeng ◽  
...  
Keyword(s):  
Double Layer ◽  
Lithium Metal ◽  
Functional Layer ◽  
Pan Fiber ◽  
Lithium Metal Anodes ◽  
Layer Coating ◽  
Metal Anodes

A PAN fiber/PI sphere double-layer coating serves as an interfacial functional layer to guide uniform Li deposition.

Role of Catalyst on Refractive Index Tunability of Porous Silica Antireflective Coatings by Sol−Gel Technique

2007 ◽  
Vol 111 (23) ◽  
pp. 8291-8298 ◽  
Author(s):  
Abhilash Vincent ◽  
Suresh Babu ◽  
Erik Brinley ◽  
Ajay Karakoti ◽  
Sameer Deshpande ◽  
...  
Keyword(s):  
Refractive Index ◽  
Sol Gel ◽  
Porous Silica ◽  
Antireflective Coatings ◽  
Gel Technique
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