Control of pressure-driven components in integrated microfluidic devices using an on-chip electrostatic microvalve
We report an electrostatic microvalve and microfluidic “pressure-amplifier” circuits used to regulate pressure-driven components (e.g., microvalves) in microfluidic systems.
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2016 ◽
Vol 136
(6)
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pp. 244-249
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2006 ◽
Vol 2
(4)
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pp. 275-290
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2012 ◽
Vol 23
(9)
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pp. 969-978
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