Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

Lab on a Chip ◽  
2014 ◽  
Vol 14 (18) ◽  
pp. 3447-3458 ◽  
Author(s):  
Koji Sugioka ◽  
Jian Xu ◽  
Dong Wu ◽  
Yasutaka Hanada ◽  
Zhongke Wang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Microfluidic Devices ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining

Femtosecond laser micromachining can directly fabricate three-dimensional (3D) microfluidic devices integrated with functional microcomponents in glass microchips.

Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

2015 ◽  
Vol 120 (2) ◽  
pp. 669-674 ◽  
Author(s):  
Xiangwei Meng ◽  
Qing Yang ◽  
Feng Chen ◽  
Chao Shan ◽  
Keyin Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Laser Micromachining ◽  
Rogowski Coil ◽  
Femtosecond Laser Micromachining

scholarly journals Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

2014 ◽  
Vol 116 (4) ◽  
pp. 2019-2023 ◽  
Author(s):  
Jintian Lin ◽  
Yingxin Xu ◽  
Jialei Tang ◽  
Nengwen Wang ◽  
Jiangxin Song ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Calcium Fluoride ◽  
Three Dimensional ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining ◽  
Microdisk Resonators

Fabrication of sealed sapphire microfluidic devices using femtosecond laser micromachining

2020 ◽  
Vol 59 (30) ◽  
pp. 9285
Author(s):  
Ahmed Elgohary ◽  
Erica Block ◽  
Jeff Squier ◽  
Mohammad Koneshloo ◽  
Rajib K. Shaha ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Microfluidic Devices ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining

Customization of microfluidic devices using femtosecond laser micromachining

2003 ◽  
Author(s):  
Tyson N. Kim ◽  
Alexander Groisman ◽  
David Kleinfeld ◽  
Chris B. Schaffer
Keyword(s):  
Femtosecond Laser ◽  
Microfluidic Devices ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining
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