Towards a comprehensive understanding of the chemical vapor deposition of titanium nitride using Ti(NMe2)4: a density functional theory approach
2008 ◽
Vol 112
(45)
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pp. 11436-11448
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2006 ◽
Vol 128
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pp. 13781-13788
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2021 ◽
Vol 655
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pp. 012055
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2013 ◽
Vol 25
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pp. 355006
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