Single component photoacid/photobase generators: potential applications in double patterning photolithography
2013 ◽
Vol 1
(15)
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pp. 2657
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2019 ◽
Vol 22
(2)
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pp. 84-91
1995 ◽
Vol 53
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pp. 502-503
1990 ◽
Vol 48
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pp. 772-773
2020 ◽
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pp. 1429-1461
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Keyword(s):
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2019 ◽
Vol 4
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pp. 322-324