Preparation and microcontact printing of platinum and palladium thin films

2013 ◽  
Vol 1 (13) ◽  
pp. 2477 ◽  
Author(s):  
Florian M. Wisser ◽  
Benjamin Schumm ◽  
Andreas Meier ◽  
Tom Engel ◽  
Julia Grothe ◽  
...  
2007 ◽  
Vol 7 (11) ◽  
pp. 3758-3764
Author(s):  
Byoung H. Lee ◽  
Myung M. Sung

We demonstrate a selective atomic layer deposition of TiO2, ZrO2, and ZnO thin films on patterned alkylsiloxane self-assembled monolayers. Microcontact printing was done to prepare patterned monolayers of the alkylsiloxane on Si substrates. The patterned monolayers define and direct the selective deposition of the metal oxide thin films using atomic layer deposition. The selective atomic layer deposition is based on the fact that the metal oxide thin films are selectively deposited only on the regions exposing the silanol groups of the Si substrates because the regions covered with the alkylsiloxane monolayers do not have any functional group to react with precursors.


2012 ◽  
Vol 14 (1) ◽  
Author(s):  
Dong Wang ◽  
Piaoping Yang ◽  
Ziyong Cheng ◽  
Wenxin Wang ◽  
Pingan Ma ◽  
...  

2007 ◽  
Vol 7 (11) ◽  
pp. 3758-3764 ◽  
Author(s):  
Byoung H. Lee ◽  
Myung M. Sung

We demonstrate a selective atomic layer deposition of TiO2, ZrO2, and ZnO thin films on patterned alkylsiloxane self-assembled monolayers. Microcontact printing was done to prepare patterned monolayers of the alkylsiloxane on Si substrates. The patterned monolayers define and direct the selective deposition of the metal oxide thin films using atomic layer deposition. The selective atomic layer deposition is based on the fact that the metal oxide thin films are selectively deposited only on the regions exposing the silanol groups of the Si substrates because the regions covered with the alkylsiloxane monolayers do not have any functional group to react with precursors.


Langmuir ◽  
2002 ◽  
Vol 18 (21) ◽  
pp. 7788-7791 ◽  
Author(s):  
D. Arrington ◽  
M. Curry ◽  
S. C. Street

Langmuir ◽  
2003 ◽  
Vol 19 (14) ◽  
pp. 5555-5558 ◽  
Author(s):  
Ziqi Liang ◽  
Kun Li ◽  
Qing Wang

RSC Advances ◽  
2015 ◽  
Vol 5 (64) ◽  
pp. 51891-51899 ◽  
Author(s):  
Meiyu Gai ◽  
Johannes Frueh ◽  
Agnes Girard-Egrot ◽  
Samuel Rebaud ◽  
Bastien Doumeche ◽  
...  

A theory and method for calculating printing resolution limits for microcontact printing of a condensed polyelectrolyte multilayer thin film, based on surface energies and line tension is presented.


2000 ◽  
Vol 12 (7) ◽  
pp. 2059-2063 ◽  
Author(s):  
Young Kyu Hwang ◽  
Soo Yuen Woo ◽  
Jong Hyeon Lee ◽  
Duk-Young Jung ◽  
Young-Uk Kwon

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