Time-resolved mass-spectral characterization of ion formation from a low-frequency, low-temperature plasma probe ambient ionization source

2014 ◽  
Vol 29 (2) ◽  
pp. 359 ◽  
Author(s):  
Jacob T. Shelley ◽  
Arne Stindt ◽  
Jens Riedel ◽  
Carsten Engelhard
2011 ◽  
Vol 83 (10) ◽  
pp. 3675-3686 ◽  
Author(s):  
George C.-Y. Chan ◽  
Jacob T. Shelley ◽  
Joshua S. Wiley ◽  
Carsten Engelhard ◽  
Ayanna U. Jackson ◽  
...  

2016 ◽  
Vol 31 (8) ◽  
pp. 1574-1581 ◽  
Author(s):  
Andriy Kuklya ◽  
Carsten Engelhard ◽  
Klaus Kerpen ◽  
Ursula Telgheder

In this study, a systematic spectroscopic characterization of a low-temperature plasma (LTP) probe operated with He/N2 gas mixtures is carried out.


2018 ◽  
Vol 2018 (1) ◽  
pp. 000728-000733
Author(s):  
Piotr Mackowiak ◽  
Rachid Abdallah ◽  
Martin Wilke ◽  
Jash Patel ◽  
Huma Ashraf ◽  
...  

Abstract In the present work we investigate the quality of low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) and plasma treated Tetraethyl orthosilicate (TEOS)-based TSV-liner films. Different designs of Trough Silicon Via (TSV) Test structures with 10μm and 20μm width and a depth of 100μm have been fabricated. Two differently doped silicon substrates have been used – highly p-doped and moderately doped. The results for break-through, resistivity and capacitance for the 20μm structures show a better performance compared to the 10μm structures. This is mainly due to increased liner thickness in the reduced aspect ratio case. Lower interface traps and oxide charge densities have been observed in the C-V measurements results for the 10μm structures.


Talanta ◽  
2011 ◽  
Vol 85 (5) ◽  
pp. 2458-2462 ◽  
Author(s):  
Xiaoyun Gong ◽  
Xingchuang Xiong ◽  
Yue’e peng ◽  
Chengdui Yang ◽  
Sichun Zhang ◽  
...  

2010 ◽  
Vol 49 (26) ◽  
pp. 4435-4437 ◽  
Author(s):  
Yueying Liu ◽  
Xiaoxiao Ma ◽  
Ziqing Lin ◽  
Mingjia He ◽  
Guojun Han ◽  
...  

2016 ◽  
Vol 88 (14) ◽  
pp. 6976-6980 ◽  
Author(s):  
Sandra Martínez-Jarquín ◽  
Abigail Moreno-Pedraza ◽  
Héctor Guillén-Alonso ◽  
Robert Winkler

The Analyst ◽  
2010 ◽  
Vol 135 (5) ◽  
pp. 971 ◽  
Author(s):  
Joshua S. Wiley ◽  
Juan F. García-Reyes ◽  
Jason D. Harper ◽  
Nicholas A. Charipar ◽  
Zheng Ouyang ◽  
...  

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