Analysis of gaseous reaction products of wet chemical silicon etching by conventional direct current glow discharge optical emission spectrometry (DC-GD-OES)

Volker Hoffmann; Marco Steinert; Jörg Acker

doi:10.1039/c1ja10033e

Analysis of gaseous reaction products of wet chemical silicon etching by conventional direct current glow discharge optical emission spectrometry (DC-GD-OES)

Journal of Analytical Atomic Spectrometry ◽

10.1039/c1ja10033e ◽

2011 ◽

Vol 26 (10) ◽

pp. 1990 ◽

Cited By ~ 19

Author(s):

Volker Hoffmann ◽

Marco Steinert ◽

Jörg Acker

Keyword(s):

Glow Discharge ◽

Direct Current ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Silicon Etching ◽

Reaction Products ◽

Gaseous Reaction ◽

Wet Chemical

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Comparison of modeling calculations with experimental results for direct current glow discharge optical emission spectrometry

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(01)00220-8 ◽

2001 ◽

Vol 56 (5) ◽

pp. 551-564 ◽

Cited By ~ 12

Author(s):

Annemie Bogaerts ◽

Ludger Wilken ◽

Volker Hoffmann ◽

Renaat Gijbels ◽

Klaus Wetzig

Keyword(s):

Glow Discharge ◽

Direct Current ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Experimental Results ◽

Emission Spectrometry

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Comparison of depth resolution for direct current and radiofrequency modes in glow discharge optical emission spectrometry

Journal of Analytical Atomic Spectrometry ◽

10.1039/ja9951000677 ◽

1995 ◽

Vol 10 (9) ◽

pp. 677-680 ◽

Cited By ~ 31

Author(s):

Frank Präßler ◽

Volker Hoffmann ◽

Joachim Schumann ◽

Klaus Wetzig

Keyword(s):

Glow Discharge ◽

Direct Current ◽

Optical Emission ◽

Depth Resolution ◽

Optical Emission Spectrometry ◽

Emission Spectrometry

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Analytical Conditions for Quantitative Analysis of Lead in Steels in Direct-current or Radio-frequency Glow Discharge Optical Emission Spectrometry

Tetsu-to-Hagane ◽

10.2355/tetsutohagane1955.90.8_593 ◽

2004 ◽

Vol 90 (8) ◽

pp. 593-597 ◽

Cited By ~ 1

Author(s):

Kazuaki WAGATSUMA

Keyword(s):

Quantitative Analysis ◽

Glow Discharge ◽

Radio Frequency ◽

Direct Current ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Radio Frequency Glow Discharge

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Surface chemical analysis. Glow discharge optical emission spectrometry (GD-OES). Introduction to use

10.3403/02144326u ◽

2015 ◽

Keyword(s):

Glow Discharge ◽

Chemical Analysis ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Surface Chemical ◽

Surface Chemical Analysis

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Low alloyed steel. Determination of C, Si, Mn, P, S, Cr, Ni, Al, Ti and Cu. Glow discharge optical emission spectrometry (routine method)

10.3403/30196841u ◽

2015 ◽

Keyword(s):

Glow Discharge ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Alloyed Steel ◽

Emission Spectrometry ◽

Routine Method ◽

Low Alloyed Steel

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Surface chemical analysis. Analysis of metal oxide films by glow-discharge optical-emission spectrometry

10.3403/30203801 ◽

2011 ◽

Keyword(s):

Glow Discharge ◽

Chemical Analysis ◽

Metal Oxide ◽

Oxide Films ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Surface Chemical ◽

Metal Oxide Films ◽

Surface Chemical Analysis

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Multi-matrix analysis by glow discharge optical emission spectrometry on spectrometers with solid-state detectors

Journal of Analytical Atomic Spectrometry ◽

10.1039/b300838j ◽

2003 ◽

Vol 18 (6) ◽

pp. 584 ◽

Cited By ~ 9

Author(s):

Zden?k Weiss

Keyword(s):

Solid State ◽

Glow Discharge ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Matrix Analysis ◽

Emission Spectrometry ◽

Solid State Detectors

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Correcting for background and inter-element effects in glow discharge optical emission spectrometry

Journal of Analytical Atomic Spectrometry ◽

10.1039/ja9940900363 ◽

1994 ◽

Vol 9 (3) ◽

pp. 363 ◽

Cited By ~ 7

Author(s):

Richard Payling ◽

Nicole V. Brown ◽

Stephen A. Gower

Keyword(s):

Glow Discharge ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry

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Development of direct-current, atmospheric-pressure, glow discharges generated in contact with flowing electrolyte solutions for elemental analysis by optical emission spectrometry

TrAC Trends in Analytical Chemistry ◽

10.1016/j.trac.2012.09.002 ◽

2012 ◽

Vol 41 ◽

pp. 105-121 ◽

Cited By ~ 69

Author(s):

Piotr Jamroz ◽

Krzysztof Greda ◽

Pawel Pohl

Keyword(s):

Direct Current ◽

Elemental Analysis ◽

Atmospheric Pressure ◽

Optical Emission ◽

Electrolyte Solutions ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Glow Discharges

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Preliminary study of the role of discharge conditions on the in-depth analysis of conducting thin films by radiofrequency glow discharge optical emission spectrometry

Journal of Analytical Atomic Spectrometry ◽

10.1039/ja9951000671 ◽

1995 ◽

Vol 10 (9) ◽

pp. 671-676 ◽

Cited By ~ 8

Author(s):

Nerea Bordel-García ◽

Rosario Pereiro-García ◽

Matilde Fernández-García ◽

Alfredo Sanz-Medel ◽

Tina R. Harville ◽

...

Keyword(s):

Thin Films ◽

Glow Discharge ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Depth Analysis ◽

Preliminary Study ◽

Radiofrequency Glow Discharge

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