Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But
2001 ◽
Vol 11
(10)
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pp. 2408-2409
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Keyword(s):
2004 ◽
Vol 233
(1-4)
◽
pp. 24-28
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2006 ◽
Vol 2006
(6)
◽
pp. 1255-1259
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Keyword(s):
Keyword(s):
1998 ◽
Vol 264-268
◽
pp. 227-230
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Keyword(s):
Keyword(s):
Keyword(s):