scholarly journals High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
X. Wen ◽  
A. Datta ◽  
L. M. Traverso ◽  
L. Pan ◽  
X. Xu ◽  
...  
Keyword(s):  
High Throughput ◽  
Near Field ◽  
Optical Lithography ◽  
Aperture Antennas ◽  
Bowtie Aperture

Quasi-3D plasmonic coupling scheme for near-field optical lithography and imaging

2015 ◽  
Vol 40 (16) ◽  
pp. 3918 ◽  
Author(s):  
Yuan Wang ◽  
Zhidong Du ◽  
Yongshik Park ◽  
Chen Chen ◽  
Xiang Zhang ◽  
...  
Keyword(s):  
Near Field ◽  
Optical Lithography ◽  
Coupling Scheme ◽  
Plasmonic Coupling

Enhanced optical near field from a bowtie aperture

2006 ◽  
Vol 88 (15) ◽  
pp. 153110 ◽  
Author(s):  
Eric X. Jin ◽  
Xianfan Xu
Keyword(s):  
Near Field ◽  
Bowtie Aperture

High throughput aperture near-field scanning optical microscopy

2000 ◽  
Vol 71 (8) ◽  
pp. 3111-3117 ◽  
Author(s):  
Phan Ngoc Minh ◽  
Takahito Ono ◽  
Masayoshi Esashi
Keyword(s):  
Optical Microscopy ◽  
High Throughput ◽  
Near Field ◽  
Scanning Optical Microscopy ◽  
Near Field Scanning

Near field properties of circular aperture antennas with Gaussian amplitude distribution

2010 ◽  
Vol 22 (6) ◽  
pp. 1315-1318 ◽  
Author(s):  
余川 Yu Chuan ◽  
陈鑫 Chen Xin ◽  
薛长江 Xue Changjiang ◽  
孟凡宝 Meng Fanbao
Keyword(s):  
Near Field ◽  
Amplitude Distribution ◽  
Circular Aperture ◽  
Aperture Antennas

Enhanced Air-Gap Control for High-Speed Plasmonic Lithography Using Solid Immersion Lens With Sharp-Ridge Nanoaperture

2011 ◽  
Author(s):  
Hyunwoo Hwang ◽  
Won-Sup Lee ◽  
No-Cheol Park ◽  
Hyunseok Yang ◽  
Young-Pil Park ◽  
...  
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
High Throughput ◽  
High Speed ◽  
Low Cost ◽  
Near Field ◽  
Nanometer Scale ◽  
Field Region ◽  
High Speeds ◽  
Gap Control

Recently, plasmonic nanolithography is studied by many researchers (1, 2 and 3). This presented a low-cost and high-throughput approach to maskless nanolithography technique that uses a metallic sharp-ridge nanoaperture with a high strong nanometer-sized optical spot induced by surface plasmon resonance. However, these nanometer-scale spots generated by metallic nanoapertures are formed in only the near-field region, which makes it very difficult to pattern above the photoresist surface at high-speeds.

A simple near-field envelope formula for square aperture antennas

Radio Science ◽  
1991 ◽  
Vol 26 (2) ◽  
pp. 611-617 ◽  
Author(s):  
R. C. Hansen
Keyword(s):  
Near Field ◽  
Aperture Antennas

Mold-assisted near-field optical lithography

1999 ◽  
Vol 46 (1-4) ◽  
pp. 69-72 ◽  
Author(s):  
Y. Chen ◽  
F. Carcenac ◽  
C. Ecoffet ◽  
D.J. Lougnot ◽  
H. Launois
Keyword(s):  
Near Field ◽  
Optical Lithography
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