Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
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2018 ◽
Vol 27
(6)
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pp. 995-1008
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2017 ◽
Vol 3
(1)
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pp. 7-10
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2020 ◽
Vol 6
(3)
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pp. 237-240