Vacuum-Free Self-Powered Parallel Electron Lithography with Sub-35-nm Resolution

Nano Letters ◽  
2010 ◽  
Vol 10 (6) ◽  
pp. 2197-2201 ◽  
Author(s):  
Yuerui Lu ◽  
Amit Lal
Keyword(s):  
Self Powered ◽  
Electron Lithography

Micropatterning of Permalloy Films by Electron Lithography

1976 ◽  
Vol 34 ◽  
pp. 448-449
Author(s):  
J. K. Maurin
Keyword(s):  
Electron Beam ◽  
Subsequent Development ◽  
Electron Optical System ◽  
Microelectronic Device ◽  
Magnetic Bubble ◽  
Control Beam ◽  
Photosensitive Material ◽  
Direct Exposure ◽  
Electron Lithography ◽  
Scanning Electron

Conductor, resistor, and dielectric patterns of microelectronic device are usually defined by exposure of a photosensitive material through a mask onto the device with subsequent development of the photoresist and chemical removal of the undesired materials. Standard optical techniques are limited and electron lithography provides several important advantages, including the ability to expose features as small as 1,000 Å, and direct exposure on the wafer with no intermediate mask. This presentation is intended to report how electron lithography was used to define the permalloy patterns which are used to manipulate domains in magnetic bubble memory devices.The electron optical system used in our experiment as shown in Fig. 1 consisted of a high resolution scanning electron microscope, a computer, and a high precision motorized specimen stage. The computer is appropriately interfaced to address the electron beam, control beam exposure, and move the specimen stage.

Self-powered ultraviolet–visible–near infrared perovskite/silicon hybrid photodetectors based on a novel Si/SnO2/MAPbI3/MoO3 heterostructure

2020 ◽  
Vol 13 (12) ◽  
pp. 121001
Author(s):  
Wei Qu ◽  
Shukun Weng ◽  
Liping Zhang ◽  
Min Sun ◽  
Bo Liu ◽  
...  
Keyword(s):  
Near Infrared ◽  
Self Powered

Development of a Self-Powered Food Sanitation Center

2002 ◽  
Author(s):  
Brady Krass ◽  
Charles Hannon ◽  
Joseph Gerstmann
Keyword(s):  
Self Powered ◽  
Food Sanitation

Interface Engineering To Boost Photoresponse Performance of Self-Powered, Broad-Bandwidth PEDOT:PSS/Si Heterojunction Photodetector

2016 ◽  
Vol 8 (29) ◽  
pp. 19158-19167 ◽  
Author(s):  
Zhimin Liang ◽  
Pingyang Zeng ◽  
Pengyi Liu ◽  
Chuanxi Zhao ◽  
Weiguang Xie ◽  
...  
Keyword(s):  
Interface Engineering ◽  
Broad Bandwidth ◽  
Self Powered

Elliptic paraboloid-based solar spectrum splitters for self-powered photobioreactors

2021 ◽  
Vol 163 ◽  
pp. 1773-1785
Author(s):  
Nima Talebzadeh ◽  
Mohsen Rostami ◽  
Paul G. O’Brien
Keyword(s):  
Solar Spectrum ◽  
Elliptic Paraboloid ◽  
Self Powered

High-quality textured SnSe thin films for self-powered, rapid-response photothermoelectric application

Nano Energy ◽  
2020 ◽  
Vol 72 ◽  
pp. 104742 ◽  
Author(s):  
Yujia Zhong ◽  
Li Zhang ◽  
Vincent Linseis ◽  
Bingchao Qin ◽  
Wenduo Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Rapid Response ◽  
High Quality ◽  
Self Powered
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