Negative-Working Photosensitive Poly(phenylene ether) Based on Poly(2,6-dimethyl-1,4-phenylene ether), a Cross-Linker, and a Photoacid Generator

Katsuhisa Mizoguchi; Tomoya Higashihara; Mitsuru Ueda

doi:10.1021/ma902526r

Negative-Working Photosensitive Poly(phenylene ether) Based on Poly(2,6-dimethyl-1,4-phenylene ether), a Cross-Linker, and a Photoacid Generator

Macromolecules ◽

10.1021/ma902526r ◽

2010 ◽

Vol 43 (6) ◽

pp. 2832-2839 ◽

Cited By ~ 5

Author(s):

Katsuhisa Mizoguchi ◽

Tomoya Higashihara ◽

Mitsuru Ueda

Keyword(s):

Cross Linker ◽

Photoacid Generator

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A New Negative-Type Photosensitive Polymer Based on Poly (2,6-dihydroxy-1,5-naphthalene), a Cross-Linker, and a Photoacid Generator

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.16.285 ◽

2003 ◽

Vol 16 (2) ◽

pp. 285-286

Author(s):

Kousuke Tsuchiya ◽

Yuji Shibasaki ◽

Masato Suzuki ◽

Mitsuru Ueda

Keyword(s):

Negative Type ◽

Photosensitive Polymer ◽

Cross Linker ◽

Photoacid Generator

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A positive type alkaline developable thermally stable and photosensitive polymer based on partially O-methylated poly(2,6-dihydroxy-1,5-naphthylene), an acidolytic de-cross-linker, and a photoacid generator

Polymer ◽

10.1016/j.polymer.2004.08.011 ◽

2004 ◽

Vol 45 (20) ◽

pp. 6873-6878 ◽

Cited By ~ 5

Author(s):

Kousuke Tsuchiya ◽

Yuji Shibasaki ◽

Mitsuru Ueda

Keyword(s):

Thermally Stable ◽

Positive Type ◽

Photosensitive Polymer ◽

Cross Linker ◽

Photoacid Generator

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A Negative Type Photosensitive Polymer Based on Poly(naphthylene ether), a Cross-Linker, and a Photoacid Generator with Low Dielectric Constant

Polymer Journal ◽

10.1295/polymj.pj2006213 ◽

2007 ◽

Vol 39 (5) ◽

pp. 442-447 ◽

Cited By ~ 8

Author(s):

Kousuke Tsuchiya ◽

Yuji Shibasaki ◽

Mitsuru Ueda

Keyword(s):

Dielectric Constant ◽

Low Dielectric Constant ◽

Negative Type ◽

Low Dielectric ◽

Photosensitive Polymer ◽

Cross Linker ◽

Photoacid Generator

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Three-Component Negative-Type Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator

Chemistry of Materials ◽

10.1021/cm980166n ◽

1998 ◽

Vol 10 (8) ◽

pp. 2230-2234 ◽

Cited By ~ 54

Author(s):

Mitsuru Ueda ◽

Daisuke Takahashi ◽

Tomonari Nakayama ◽

Osamu Haba

Keyword(s):

Negative Type ◽

Cross Linker ◽

Photoacid Generator

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New Negative-Type Photosensitive Polyimide Based on Hyperbranched Poly(ether imide), a Cross-Linker, and a Photoacid Generator

Chemistry Letters ◽

10.1246/cl.2001.762 ◽

2001 ◽

Vol 30 (8) ◽

pp. 762-763 ◽

Cited By ~ 11

Author(s):

Masaki Okazaki ◽

Yuji Shibasaki ◽

Mitsuru Ueda

Keyword(s):

Negative Type ◽

Hyperbranched Poly ◽

Cross Linker ◽

Photoacid Generator

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A Negative-Type Photosensitive Poly(3-hexylthiophene) with Cross-Linker and Photoacid Generator

Polymer Journal ◽

10.1295/polymj.pj2009125 ◽

2009 ◽

Vol 41 (10) ◽

pp. 808-809 ◽

Cited By ~ 9

Author(s):

Keita Endo ◽

Tomohito Ogura ◽

Tomoya Higashihara ◽

Mitsuru Ueda

Keyword(s):

Negative Type ◽

Cross Linker ◽

Photoacid Generator

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A Negative-Working Alkaline Developable Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator

Chemistry Letters ◽

10.1246/cl.1997.265 ◽

1997 ◽

Vol 26 (3) ◽

pp. 265-266 ◽

Cited By ~ 35

Author(s):

Tomonari Nakayama ◽

Kohji Haga ◽

Osamu Haba ◽

Mitsuru Ueda

Keyword(s):

Cross Linker ◽

Photoacid Generator

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Alkaline‐developable positive‐type photosensitive polyimide with high mechanical strength and high resolution based on chain extendable poly(amic acid), thermally degradable cross‐linker and photoacid generator

Journal of Polymer Science ◽

10.1002/pol.20190230 ◽

2020 ◽

Vol 58 (7) ◽

pp. 948-955 ◽

Cited By ~ 1

Author(s):

Yao‐Ming Yeh ◽

Mitsuru Ueda ◽

Chain‐Shu Hsu

Keyword(s):

High Resolution ◽

Mechanical Strength ◽

Amic Acid ◽

High Mechanical Strength ◽

Positive Type ◽

Cross Linker ◽

Photoacid Generator

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A Negative-type Photosensitive Polymer Based on Poly(2,6-dimethyl-1,4-phenylene ether), a Cross-Linker and a Photoacid Generator

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.2.187 ◽

2007 ◽

Vol 2 (2) ◽

pp. 187-188

Author(s):

Katsuhisa Mizoguchi ◽

Kousuke Tsuchiya ◽

Yuji Shibasaki ◽

Mitsuru Ueda

Keyword(s):

Negative Type ◽

Photosensitive Polymer ◽

Cross Linker ◽

Photoacid Generator

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New Negative-Type Photosensitive Poly(phenylene ether):2 Poly(2-hydroxy-6-methylphenol-co-2,6-dimethylphenol), a Cross-Linker, and a Photoacid Generator.

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.13.345 ◽

2000 ◽

Vol 13 (2) ◽

pp. 345-349 ◽

Cited By ~ 9

Author(s):

Kazumasa Takeshi ◽

Ken-ichi Okuyama ◽

Yoshihiro Ohba ◽

Mitsuru Ueda

Keyword(s):

Negative Type ◽

Cross Linker ◽

Photoacid Generator

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