Core−Shell-Shaped Organic−Inorganic Hybrid as Pore Generator for Imprinting Nanopores in Organosilicate Dielectric Films
Keyword(s):
2019 ◽
Vol 58
(2)
◽
pp. 020907
◽
2009 ◽
Vol 113
(29)
◽
pp. 12669-12673
◽
Keyword(s):
2014 ◽
Vol 2
(35)
◽
pp. 14502
◽