Scattering Studies of Nanoporous Organosilicate Thin Films Imprinted with Reactive Star Porogens

2005 ◽  
Vol 38 (22) ◽  
pp. 8991-8995 ◽  
Author(s):  
B. Lee ◽  
W. Oh ◽  
J. Yoon ◽  
Y. Hwang ◽  
J. Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Organosilicate Thin Films

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Oriented Mesoporous Organosilicate Thin Films

Nano Letters ◽  
2005 ◽  
Vol 5 (10) ◽  
pp. 2014-2018 ◽  
Author(s):  
Erik M. Freer ◽  
Leslie E. Krupp ◽  
William D. Hinsberg ◽  
Philip M. Rice ◽  
James L. Hedrick ◽  
...  
Keyword(s):  
Thin Films ◽  
Organosilicate Thin Films

Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications

2013 ◽  
Vol 102 (22) ◽  
pp. 221909 ◽  
Author(s):  
Emil H. Zin ◽  
W. H. Bang ◽  
E. Todd Ryan ◽  
Sean W. King ◽  
Choong-Un Kim
Keyword(s):  
Thin Films ◽  
Viscoplastic Deformation ◽  
Organosilicate Thin Films ◽  
Low K

scholarly journals Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants

2006 ◽  
Vol 40 (s1) ◽  
pp. s626-s630 ◽  
Author(s):  
Weontae Oh ◽  
Yongtaek Hwang ◽  
Tae Joo Shin ◽  
Byeongdu Lee ◽  
Jong-Seong Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Constants ◽  
X Ray ◽  
Low Dielectric ◽  
Organosilicate Thin Films

Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films

2008 ◽  
Vol 20 (16) ◽  
pp. 3159-3164 ◽  
Author(s):  
Markus D. Ong ◽  
Willi Volksen ◽  
Geraud Dubois ◽  
Victor Lee ◽  
Phillip J. Brock ◽  
...  
Keyword(s):  
Thin Films ◽  
Controlled Fracture ◽  
Organosilicate Thin Films

The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films

2011 ◽  
Vol 26 (19) ◽  
pp. 2524-2532 ◽  
Author(s):  
Soheil Barakat ◽  
Pearl Lee-Sullivan ◽  
Steven A. Vitale ◽  
Ting Y. Tsui
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Fracture Behaviors ◽  
Temperature And Pressure ◽  
Organosilicate Thin Films ◽  
Image Position

Abstract

Templated germanium nanowire synthesis using oriented mesoporous organosilicate thin films

2006 ◽  
Vol 24 (5) ◽  
pp. 2220 ◽  
Author(s):  
Hemanth Jagannathan ◽  
Michael Deal ◽  
Yoshio Nishi ◽  
Ho-Cheol Kim ◽  
Erik M. Freer ◽  
...  
Keyword(s):  
Thin Films ◽  
Nanowire Synthesis ◽  
Organosilicate Thin Films

Effects of e-beam curing on glass structureand mechanical properties of nanoporous organosilicate thin films

2010 ◽  
Vol 101 (2) ◽  
pp. 228-235 ◽  
Author(s):  
David M. Gage ◽  
Luming Peng ◽  
Jonathan Stebbins ◽  
Kang Sub Yim ◽  
Amir Al-Bayati ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Organosilicate Thin Films

Removal of organic template of mesoporous organosilicate thin films using supercritical carbon dioxide fluids

2017 ◽  
Vol 56 (7S2) ◽  
pp. 07KF02 ◽  
Author(s):  
Eiichi Kondoh ◽  
Koki Segawa ◽  
Mitsuhiro Watanabe ◽  
Lianhua Jin ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Organic Template ◽  
Organosilicate Thin Films ◽  
Supercritical Carbon
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