Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-kDielectrics by Self-Assembled Monolayers

Langmuir ◽  
2014 ◽  
Vol 30 (13) ◽  
pp. 3832-3844 ◽  
Author(s):  
Yiting Sun ◽  
Mikhail Krishtab ◽  
Herbert Struyf ◽  
Patrick Verdonck ◽  
Steven De Feyter ◽  
...  
1998 ◽  
Vol 95 (6) ◽  
pp. 1339-1342 ◽  
Author(s):  
R. Michalitsch ◽  
A. El Kassmi ◽  
P. Lang ◽  
A. Yassar ◽  
F. Garnier

2003 ◽  
Vol 104 ◽  
pp. 459-462 ◽  
Author(s):  
R. Klauser ◽  
M. Zharnikov ◽  
I.-H. Hong ◽  
S.-C. Wang ◽  
A. Gölzhäuser ◽  
...  

2009 ◽  
Vol 25 (1) ◽  
pp. 83-86 ◽  
Author(s):  
Guo-Qiang TAN ◽  
Hai-Yang BO ◽  
Hong-Yan MIAO ◽  
Ao XIA ◽  
Zhong-Liang HE

Sign in / Sign up

Export Citation Format

Share Document