Site-Selective Surface Modification Using Enzymatic Soft Lithography

Langmuir ◽  
2011 ◽  
Vol 27 (12) ◽  
pp. 7629-7634 ◽  
Author(s):  
Aurélie Guyomard-Lack ◽  
Nicolas Delorme ◽  
Céline Moreau ◽  
Jean-François Bardeau ◽  
Bernard Cathala
2006 ◽  
Vol 917 ◽  
Author(s):  
Rong Chen ◽  
David W. Porter ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent

AbstractArea selective HfO2 thin film growth through atomic layer deposition (ALD) has been achieved on octadecyltrichlorosilane (ODTS) patterned Si substrates. Patterned hydrophobic self-assembled monolayers (SAMs) were first transferred to Si substrates by micro-contact printing. Using hafnium-tetrachloride or tetrakis(dimethylamido) hafnium(IV) and water as ALD precursors, amorphous HfO2 layers were then grown selectively on the SAM-free regions of the surface where native hydroxyl groups nucleate growth from the vapor phase. The HfO2 pattern was readily observed through scanning electron microscopy and scanning Auger imaging, demonstrating that soft lithography is a simple and promising method to achieve area selective ALD. To evaluate the selectivity, the resolution of the soft lithography based method was compared with that of area selective ALD of HfO2 by selective surface modification of patterned silicon oxide obtained using long-time SAM exposure. It was found that the selective surface modification showed much higher spatial resolution and selectivity, an observation consistent with previous studies indicating that highly ordered and densely packed ODTS films were important to achieve complete deactivation.


ChemPhysChem ◽  
2011 ◽  
Vol 12 (6) ◽  
pp. 1143-1147 ◽  
Author(s):  
Wei Su ◽  
Peiyuan Li ◽  
Libei Yao ◽  
Fang Yang ◽  
Lifang Liang ◽  
...  

Author(s):  
Shoushou He ◽  
Austin M. Evans ◽  
Elena Meirzadeh ◽  
Sae Young Han ◽  
Jake C. Russell ◽  
...  

2012 ◽  
Vol 22 (2) ◽  
pp. 328-332 ◽  
Author(s):  
Antony George ◽  
Tomasz M. Stawski ◽  
Sandeep Unnikrishnan ◽  
Sjoerd A. Veldhuis ◽  
Johan E. ten Elshof

2016 ◽  
Vol 4 (47) ◽  
pp. 18426-18431 ◽  
Author(s):  
C. Weinberger ◽  
X. Cao ◽  
M. Tiemann

Ordered, bimodal mesoporous carbon with distinct pore modes of different hydrophobicity is prepared by selective surface modification.


2014 ◽  
Vol 71 (9-12) ◽  
pp. 1749-1755 ◽  
Author(s):  
L. P. Yeo ◽  
B. K. Lok ◽  
Q. M. P. Nguyen ◽  
C. W. Lu ◽  
Y. C. Lam

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