Anisotropic Thermal Expansion Behavior of Thin Films of Polymethylsilsesquioxane, a Spin-on-Glass Dielectric for High-Performance Integrated Circuits
2006 ◽
Vol 41
(3)
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pp. 674-682
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Keyword(s):
2019 ◽
Vol 44
(45)
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pp. 24746-24758
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