Nondestructive in Situ Characterization of Molecular Structures at the Surface and Buried Interface of Silicon-Supported Low-k Dielectric Films
2015 ◽
Vol 119
(4)
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pp. 1736-1746
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Keyword(s):
2009 ◽
Vol 11
(20)
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pp. 3958
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1981 ◽
Vol 10
(4)
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pp. 321-330
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2000 ◽
Vol 2
(9)
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pp. 2005-2014
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