In Situ IR Spectroscopic Investigation of Alumina ALD on Porous Silica Films: Thermal versus Plasma-Enhanced ALD
2014 ◽
Vol 118
(51)
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pp. 29854-29859
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2000 ◽
Vol 2
(22)
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pp. 5180-5188
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2013 ◽
Vol 250
(6)
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pp. 1165-1173
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2018 ◽
Vol 1
(12)
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pp. 7083-7091
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