Simulation of Titanium Metal/Titanium Dioxide Etching with Chlorine and Hydrogen Chloride Gases Using the ReaxFF Reactive Force Field
2013 ◽
Vol 117
(27)
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pp. 5655-5663
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2014 ◽
Vol 95
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pp. 579-591
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2018 ◽
Vol 123
(2)
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pp. 1208-1218
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Keyword(s):
2012 ◽
Vol 116
(15)
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pp. 3918-3925
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2019 ◽
Vol 151
(9)
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pp. 094503
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2017 ◽
Vol 8
(13)
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pp. 2812-2818
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