Three-Dimensional Etching Profiles and Surface Speciations (via Attenuated Total Reflection-Fourier Transform Infrared Spectroscopy) of Silicon Nanowires in NH4F-Buffered HF Solutions:  A Double Passivation Model

2005 ◽  
Vol 109 (46) ◽  
pp. 21716-21724 ◽  
Author(s):  
Boon K. Teo ◽  
W. W. Chen ◽  
X. H. Sun ◽  
S. D. Wang ◽  
S. T. Lee
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