Low-Temperature Growth of Epitaxial β-SiC on Si(100) Using Supersonic Molecular Beams of Methylsilane†
2002 ◽
Vol 106
(33)
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pp. 8019-8028
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Keyword(s):
1992 ◽
Vol 117
(1-4)
◽
pp. 125-128
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1991 ◽
Vol 30
(Part 2, No. 6A)
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pp. L1042-L1044
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Keyword(s):
2013 ◽
Vol 110
(29)
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pp. 11757-11762
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Keyword(s):
Keyword(s):