Volatile and Thermally Stable Mid to Late Transition Metal Complexes Containing α-Imino Alkoxide Ligands, a New Strongly Reducing Coreagent, and Thermal Atomic Layer Deposition of Ni, Co, Fe, and Cr Metal Films
2013 ◽
Vol 135
(34)
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pp. 12588-12591
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2021 ◽
2021 ◽
2005 ◽
Vol 2005
(21)
◽
pp. 4382-4392
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Keyword(s):
2008 ◽
pp. 113-155
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Keyword(s):
2009 ◽
Vol 127
(3)
◽
pp. 141-148
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Keyword(s):