Mechanistic insight into gas-phase reactions of hydrogen atom with disilane and hydrogen atom etching of silicon surfaces
1993 ◽
Vol 115
(9)
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pp. 3731-3738
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Keyword(s):
2010 ◽
Vol 114
(47)
◽
pp. 12490-12497
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1968 ◽
Vol 49
(12)
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pp. 5345-5349
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Keyword(s):
1992 ◽
Vol 117
◽
pp. 299-326
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2001 ◽
Vol 123
(10)
◽
pp. 2165-2175
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2017 ◽
Vol 30
(5)
◽
pp. 1177-1187
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Keyword(s):