Investigation of the Etching of Silicon under Subcritical Water Conditions
2013 ◽
Vol 53
(1)
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pp. 173-181
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2010 ◽
Vol 160
(1)
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pp. 259-266
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2014 ◽
Vol 170
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pp. 454-461
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2009 ◽
Vol 87
(6)
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pp. 867-873
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2018 ◽
Vol 334
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pp. 012076
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2013 ◽
Vol 92
(4)
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pp. 615-622
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2015 ◽
Vol 37
(3)
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pp. 306-311
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2019 ◽
Vol 20
(3)
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pp. 123-128
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