Modeling and Real-Time Control of Multizone Thermal Processing System for Photoresist Processing

2013 ◽  
Vol 52 (13) ◽  
pp. 4805-4814 ◽  
Author(s):  
Arthur Tay ◽  
Hui Tong Chua ◽  
Wang Yuheng ◽  
Yang Geng ◽  
Ho Weng Khuen
Keyword(s):  
Real Time ◽  
Thermal Processing ◽  
Processing System ◽  
Real Time Control ◽  
Time Control

A New Flexible Rapid Thermal Processing System

1995 ◽  
Vol 389 ◽  
Author(s):  
K. C. Saraswat ◽  
Y. Chen ◽  
L. Degertekin ◽  
B. T. Khuri-Yakub
Keyword(s):  
Control System ◽  
Real Time ◽  
Processing System ◽  
Process Conditions ◽  
Temperature Uniformity ◽  
Real Time Control ◽  
Wafer Temperature ◽  
Time Control ◽  
Wide Range ◽  
Optical Flux

ABSTRACTA highly flexible Rapid Thermal Multiprocessing (RTM) reactor is described. This flexibility is the result of several new innovations: a lamp system, an acoustic thermometer and a real-time control system. The new lamp has been optimally designed through the use of a “virtual reactor” methodology to obtain the best possible wafer temperature uniformity. It consists of multiple concentric rings composed of light bulbs with horizontal filaments. Each ring is independently and dynamically controlled providing better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions. An acoustic thermometer non-invasively allows complete wafer temperature tomography under all process conditions - a critically important measurement never obtained before. For real-time equipment and process control a model based multivariable control system has been developed. Extensive integration of computers and related technology for specification, communication, execution, monitoring, control, and diagnosis demonstrates the programmability of the RTM.

A New Flexible Rapid Thermal Processing System

1995 ◽  
Vol 387 ◽  
Author(s):  
K. C. Saraswat ◽  
Y. Chen ◽  
L. Degertekin ◽  
B. T. Khuri-Yakub
Keyword(s):  
Control System ◽  
Real Time ◽  
Processing System ◽  
Process Conditions ◽  
Temperature Uniformity ◽  
Real Time Control ◽  
Wafer Temperature ◽  
Time Control ◽  
Wide Range ◽  
Optical Flux

AbstractA highly flexible Rapid Thermal Multiprocessing (RTM) reactor is described. This flexibility is the result of several new innovations: a lamp system, an acoustic thermometer and a real-time control system. The new lamp has been optimally designed through the use of a “virtual reactor” methodology to obtain the best possible wafer temperature uniformity. It consists of multiple concentric rings composed of light bulbs with horizontal filaments. Each ring is independently and dynamically controlled providing better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions. An acoustic thermometer non-invasively allows complete wafer temperature tomography under all process conditions - a critically important measurement never obtained before. For real-time equipment and process control a model based multivariable control system has been developed. Extensive integration of computers and related technology for specification, communication, execution, monitoring, control, and diagnosis demonstrates the programmability of the RTM.

A Real Time Control Architecture for Continuously Managing Patients in a Care Unit

1995 ◽  
Vol 34 (05) ◽  
pp. 475-488
Author(s):  
B. Seroussi ◽  
J. F. Boisvieux ◽  
V. Morice
Keyword(s):  
Real Time ◽  
Linear Time ◽  
Treatment Plan ◽  
Control Architecture ◽  
Real Time Control ◽  
Time Representation ◽  
Time Control ◽  
Continuous Support ◽  
Definition Of ◽  
Computerized System

Abstract:The monitoring and treatment of patients in a care unit is a complex task in which even the most experienced clinicians can make errors. A hemato-oncology department in which patients undergo chemotherapy asked for a computerized system able to provide intelligent and continuous support in this task. One issue in building such a system is the definition of a control architecture able to manage, in real time, a treatment plan containing prescriptions and protocols in which temporal constraints are expressed in various ways, that is, which supervises the treatment, including controlling the timely execution of prescriptions and suggesting modifications to the plan according to the patient’s evolving condition. The system to solve these issues, called SEPIA, has to manage the dynamic, processes involved in patient care. Its role is to generate, in real time, commands for the patient’s care (execution of tests, administration of drugs) from a plan, and to monitor the patient’s state so that it may propose actions updating the plan. The necessity of an explicit time representation is shown. We propose using a linear time structure towards the past, with precise and absolute dates, open towards the future, and with imprecise and relative dates. Temporal relative scales are introduced to facilitate knowledge representation and access.

Real-time Control for Mobile Robot Considering Environmental Changes

2007 ◽  
Vol 73 (12) ◽  
pp. 1369-1374
Author(s):  
Hiromi SATO ◽  
Yuichiro MORIKUNI ◽  
Kiyotaka KATO
Keyword(s):  
Mobile Robot ◽  
Real Time ◽  
Environmental Changes ◽  
Real Time Control ◽  
Time Control
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