The zwitterionic λ5Si-tetrafluorosilicates F4SiCH2NMe2H (1) and F4SiCH2NMe3 (2) behave as Lewis acids and react with [Me3NH]F (molar ratio 1:1) in aqueous solution to yield the ionic λ6Si-pentafluorosilicates [Me3NH][F5SiCH2NMe2H] (3) and [Me3NH][F5SiCH2NMe3] (4), respectively. These hexacoordinate silicon compounds contain singly charged λ6Si-silicate anions ([F5SiCH2NMe2H]- , [F5SiCH2NMe3]- ) with an SiF5C skeleton. Compounds 3 and 4 were isolated as the crystalline hydrates 3·H2O (yield 80%) and 4·H2O (yield 82%) which were structurally characterized by single-crystal X-ray diffraction. The Si-coordination polyhedra in the crystals of 3·H2O and 4·H2O are slightly distorted octahedra