Kinetics of Fast Interfacial Reactions in Laminar Tube Flow

1966 ◽  
Vol 5 (1) ◽  
pp. 148-148
Author(s):  
Chatten Cowherd ◽  
H. E. Hoelscher
Keyword(s):  
Interfacial Reactions ◽  
Tube Flow ◽  
Laminar Tube Flow ◽  
Kinetics Of

Ion Beam Induced Interfacial Reactions in Molybdenum Thin Films on Silicon

1981 ◽  
Vol 39 ◽  
pp. 162-163
Author(s):  
L. J. Chen ◽  
L. S. Hung ◽  
J. W. Mayer
Keyword(s):  
Ion Beam ◽  
Chemical Vapor ◽  
Interfacial Reactions ◽  
Practical Applications ◽  
Microelectronic Devices ◽  
Recent Emergence ◽  
Chemical Vapor Deposited ◽  
Atomic Mixing ◽  
Silicon Interface ◽  
Kinetics Of

When an energetic ion penetrates through an interface between a thin film (of species A) and a substrate (of species B), ion induced atomic mixing may result in an intermixed region (which contains A and B) near the interface. Most ion beam mixing experiments have been directed toward metal-silicon systems, silicide phases are generally obtained, and they are the same as those formed by thermal treatment.Recent emergence of silicide compound as contact material in silicon microelectronic devices is mainly due to the superiority of the silicide-silicon interface in terms of uniformity and thermal stability. It is of great interest to understand the kinetics of the interfacial reactions to provide insights into the nature of ion beam-solid interactions as well as to explore its practical applications in device technology.About 500 Å thick molybdenum was chemical vapor deposited in hydrogen ambient on (001) n-type silicon wafer with substrate temperature maintained at 650-700°C. Samples were supplied by D. M. Brown of General Electric Research & Development Laboratory, Schenectady, NY.

Dispersion in laminar tube flow at low Peclet numbers or short times

AIChE Journal ◽  
1988 ◽  
Vol 34 (9) ◽  
pp. 1423-1430 ◽  
Author(s):  
J. S. Vrentas ◽  
C. M. Vrentas
Keyword(s):  
Tube Flow ◽  
Laminar Tube Flow ◽  
Short Times

Heat transfer and reaction in laminar tube flow

AIChE Journal ◽  
1966 ◽  
Vol 12 (2) ◽  
pp. 213-220 ◽  
Author(s):  
R. I. Rothenberg ◽  
J. M. Smith
Keyword(s):  
Heat Transfer ◽  
Tube Flow ◽  
Laminar Tube Flow
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