Atomic Layer Deposition of Iridium Oxide Thin Films from Ir(acac)3and Ozone

2008 ◽  
Vol 20 (9) ◽  
pp. 2903-2907 ◽  
Author(s):  
Jani Hämäläinen ◽  
Marianna Kemell ◽  
Frans Munnik ◽  
Ulrich Kreissig ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

2011 ◽  
Vol 21 (41) ◽  
pp. 16488 ◽  
Author(s):  
Jani Hämäläinen ◽  
Timo Hatanpää ◽  
Esa Puukilainen ◽  
Timo Sajavaara ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Phase control of iridium and iridium oxide thin films in atomic layer deposition

2008 ◽  
Vol 103 (2) ◽  
pp. 023517 ◽  
Author(s):  
Sung-Wook Kim ◽  
Se-Hun Kwon ◽  
Dong-Kee Kwak ◽  
Sang-Won Kang
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Phase Control ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Langmuir ◽  
2016 ◽  
Vol 32 (41) ◽  
pp. 10559-10569 ◽  
Author(s):  
Miika Mattinen ◽  
Jani Hämäläinen ◽  
Feng Gao ◽  
Pasi Jalkanen ◽  
Kenichiro Mizohata ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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