Vertically Aligned Nanopillar Arrays with Hard Skins Using Anodic Aluminum Oxide for Nano Imprint Lithography

2005 ◽  
Vol 17 (24) ◽  
pp. 6181-6185 ◽  
Author(s):  
Pyung-Soo Lee ◽  
Ok-Joo Lee ◽  
Sun-Kyu Hwang ◽  
Seung-Ho Jung ◽  
Sang Eun Jee ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Imprint Lithography ◽  
Anodic Aluminum ◽  
Vertically Aligned ◽  
Nanopillar Arrays ◽  
Nano Imprint

Fabrication of AR Film Using Nano-Imprint Process with a Diamond Mold

2012 ◽  
Vol 512-515 ◽  
pp. 2072-2075
Author(s):  
Hung Yin Tsai ◽  
Ching Wen Liu ◽  
Chia Jen Ting
Keyword(s):  
Chemical Vapor Deposition ◽  
Aluminum Oxide ◽  
Vapor Deposition ◽  
Nanoimprint Lithography ◽  
Anodic Aluminum Oxide ◽  
Chemical Vapor ◽  
The Self ◽  
Anodic Aluminum ◽  
Hot Filament ◽  
Nano Imprint

Owning to the robust characteristics of diamonds, a nano-tip array structured mold was fabricated with diamond, we can then use this mold to produce anti-reflection (AR) films with nanoimprint lithography. Taking advantage of the self-ordered characteristic of anodic aluminum oxide (AAO), we can obtain the diamond mold by depositing a layer of diamond on the AAO using hot filament chemical vapor deposition (HFCVD). Then taking advantage of the high through-put characteristics of nanoimprint lithography, AR films can be mass produced. The AR films were subjected to reflectivity inspections, a 5.5% reduction in reflectivity was obtained.

Fabrication of microchannel containing nanopillar arrays using micromachined AAO (anodic aluminum oxide) mold

2007 ◽  
Vol 84 (5-8) ◽  
pp. 1532-1535 ◽  
Author(s):  
Dong Sung Kim ◽  
Han Ul Lee ◽  
Nam Hyo Kim ◽  
Kun-Hong Lee ◽  
Dong-Woo Cho ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Nanopillar Arrays

Electromechanical Properties of Vertically Aligned Carbon Nanotube

2013 ◽  
Vol 705 ◽  
pp. 332-336 ◽  
Author(s):  
Alimorad Rashidi ◽  
M. Omidi ◽  
M. Choolaei ◽  
M. Nazarzadeh ◽  
A. Yadegari ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Nanotube ◽  
Aluminum Oxide ◽  
Physical Properties ◽  
Anodic Aluminum Oxide ◽  
Electromechanical Properties ◽  
Simple Method ◽  
Anodic Aluminum ◽  
Cylindrical Pores ◽  
Vertically Aligned

In this paper a simple method is used for fabrication of vertically aligned carbon nanotube (VACNT) within the cylindrical pores anodic aluminum oxide (AAO) substrate. Electronic and mechanical properties of VACNT have been obtained after removing AAO substrate. Vertically aligned carbon nanotube shows very interesting electromechanical properties which can be used in CNT-based sensors to detect chemical analytical or physical properties such as temperature orpressure.

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