Insolubilization mechanism of a chemical amplification negative-resist system utilizing an acid-catalyzed silanol condensation reaction
1990 ◽
Vol 3
(3)
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pp. 385-388
2009 ◽
Vol 39
(3)
◽
pp. 161-164
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1970 ◽
Vol 18
(11)
◽
pp. 794-802
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1997 ◽
Vol 35
(1)
◽
pp. 77-89
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Keyword(s):
1990 ◽
Vol 29
(Part 1, No. 11)
◽
pp. 2632-2637
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