Since the high Tc superconductors were discovered, the most common compounds have been investigated in detail. This work has mainly been done on bulk specimens. Now as the preparation of these high Tc superconductors is well controlled with respect to the common compounds, thin films become of major interest. In order to study the film—substrate interface cross-sectional specimens for TEM have here been prepared and investigated considering the process of image formation.Thin films, about 100 nm thick, were laser ablated onto a single crystal MgO substrate. This was done in an oxygen atmosphere and with a rotating target of stoichiometric YBa2Cu3O7−x. The subsequent X—ray analysis showed what was believed to be an epitaxially grown film, with its c—axis only deviating a few degrees from the substrate normal. The a— and b—axes of the film were oriented parallel to the <100> directions of the substrate, in spite of a lattice mismatch (YBa2Cu3O7−x a = 3.82 Å, b = 3.89 Å, c = 11.68 Å; MgO a = b = c = 4.2 Å).