Effects of Hydrogen in Working Gas on Valence States of Oxygen in Sputter-Deposited Indium Tin Oxide Thin Films

2010 ◽  
Vol 2 (3) ◽  
pp. 663-668 ◽  
Author(s):  
Suning Luo ◽  
Shigemi Kohiki ◽  
Koichi Okada ◽  
Atsushi Kohno ◽  
Takayuki Tajiri ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Valence States ◽  
Sputter Deposited

scholarly journals Sputter-Deposited Indium–Tin Oxide Thin Films for Acetaldehyde Gas Sensing

Coatings ◽  
2016 ◽  
Vol 6 (2) ◽  
pp. 19 ◽  
Author(s):  
Umut Cindemir ◽  
Pia Lansåker ◽  
Lars Österlund ◽  
Gunnar Niklasson ◽  
Claes-Göran Granqvist
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Gas Sensing ◽  
Oxide Thin Films ◽  
Sputter Deposited

Plasma-assisted deposition of indium tin oxide thin films by sublimation using an anodic vacuum arc discharge

2021 ◽  
pp. 138731
Author(s):  
Bert Scheffel ◽  
Olaf Zywitzki ◽  
Thomas Preußner ◽  
Torsten Kopte
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Oxide Thin Films

Study on the physical properties of indium tin oxide thin films deposited by microwave-assisted spray pyrolysis

2017 ◽  
Vol 728 ◽  
pp. 1338-1345 ◽  
Author(s):  
Lihua Zhang ◽  
Jianbo Lan ◽  
Jianyu Yang ◽  
Shenghui Guo ◽  
Jinhui Peng ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Spray Pyrolysis ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Microwave Assisted

Effects of the Process Parameters on the Properties of Sputter-Deposited Tin Oxide Thin Films

2019 ◽  
Vol 19 (3) ◽  
pp. 1301-1307
Author(s):  
Sang Woo Woo ◽  
Han Byeol Seo ◽  
Jinsung Choi ◽  
Byung Seong Bae ◽  
Eui-Jung Yun
Keyword(s):  
Thin Films ◽  
Process Parameters ◽  
Tin Oxide ◽  
Oxide Thin Films ◽  
Sputter Deposited
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