Transparent, Conducting ATO Thin Films by Epoxide-Initiated Sol–Gel Chemistry: A Highly Versatile Route to Mixed-Metal Oxide Films

2012 ◽  
Vol 4 (5) ◽  
pp. 2464-2473 ◽  
Author(s):  
Matthias M. Koebel ◽  
Digambar Y. Nadargi ◽  
Giselle Jimenez-Cadena ◽  
Yaroslav E. Romanyuk
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Sol Gel ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Metal Oxide Films ◽  
Mixed Metal ◽  
Transparent Conducting

Preparation and optical study of APCVD mixed metal oxide films

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-385-Pr3-390 ◽  
Author(s):  
T. Ivanova ◽  
K. A. Gesheva ◽  
A. Szekeres ◽  
A. Maksimov ◽  
S. Zaitzev
Keyword(s):  
Metal Oxide ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Optical Study ◽  
Metal Oxide Films ◽  
Mixed Metal

Effect of Electrode Materials on the Microstructure of Sol-Gel Derived Pzt Ferroelectric Thin Films

1991 ◽  
Vol 243 ◽  
Author(s):  
Sharon A. Myers ◽  
Edward R. Myers
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Electrode Materials ◽  
Volume Fraction ◽  
Sol Gel ◽  
Oxide Films ◽  
Pyrochlore Phase ◽  
Ferroelectric Thin Films ◽  
Metal Oxide Films ◽  
Wide Range

AbstractA wide range of electrode materials have been investigated for use in ferroelectric-silicon CMOS technology. Numerous metal and metal-oxide films were deposited on silicon substrates and coated with sol-gel derived ferroelectric thin films. The films were sintered in either a diffusion furnace or by rapid thermal processing. Transmission electron microscopy was used to investigate the evolution of the resulting ferroelectric thin film microstructure and ferroelectric / electrode material interactions.Microstructural differences such as the volume fraction of the ferroelectric perovskite and pyrochlore phase, domains and grain structure are correlated with electrical results. A strong microstructural dependence on the substrate was found for the Cr, Zr, Hf and Ni electrode materials. In general, chromium and other metal-oxide films had high leakage currents and large volume fractions of the non-ferroelectric pyrochlore phase. Nickel electrodes displayed the best electrical results, but the microstructure is very different from the other ferroelectric films.

Mixed metal oxide films as pH sensing materials

2007 ◽  
Author(s):  
Khalil Arshak ◽  
Edric Gill ◽  
Olga Korostynska ◽  
Arousian Arshak
Keyword(s):  
Metal Oxide ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Ph Sensing ◽  
Metal Oxide Films ◽  
Mixed Metal

Mixed-metal oxide films via a heterobimetallic complex as an MOCVD single-source precursor

1996 ◽  
pp. 2239 ◽  
Author(s):  
Shin-Guang Shyu ◽  
Juan-Seng Wu ◽  
Shiow-Huey Chuang ◽  
Kai-Ming Chi ◽  
Yung-Sheng Sung
Keyword(s):  
Metal Oxide ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Single Source ◽  
Metal Oxide Films ◽  
Mixed Metal ◽  
Heterobimetallic Complex ◽  
Single Source Precursor

Mixed metal oxide films as pH sensing materials

2007 ◽  
Vol 14 (4-5) ◽  
pp. 499-507 ◽  
Author(s):  
Edric Gill ◽  
Khalil Arshak ◽  
Arousian Arshak ◽  
Olga Korostynska
Keyword(s):  
Metal Oxide ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Ph Sensing ◽  
Metal Oxide Films ◽  
Mixed Metal

scholarly journals Preparation of Mixed Metal Oxide Films by Electrostatic Spray Deposition.

1998 ◽  
Vol 49 (8) ◽  
pp. 911-912
Author(s):  
Kohta YAMADA ◽  
Nobuaki SATO ◽  
Takeo FUJINO ◽  
Matsuhiko NISHIZAWA ◽  
Isamu UCHIDA
Keyword(s):  
Metal Oxide ◽  
Spray Deposition ◽  
Oxide Films ◽  
Mixed Metal Oxide ◽  
Metal Oxide Films ◽  
Mixed Metal ◽  
Electrostatic Spray Deposition ◽  
Electrostatic Spray
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