Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiNx on Photonic Crystal—Laser Diodes for Facet Passivation
Keyword(s):
2013 ◽
Vol 39
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pp. S269-S272
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Keyword(s):
2017 ◽
pp. 561-584
Keyword(s):
2013 ◽
Vol 24
(12)
◽
pp. 2695-2707
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2016 ◽
Vol 33
(9)
◽
pp. 1949
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Keyword(s):