Two-Dimensional to Three-Dimensional Growth of Transition Metal Diselenides by Chemical Vapor Deposition: Interplay between Fractal, Dendritic, and Compact Morphologies

2020 ◽  
Vol 12 (13) ◽  
pp. 15885-15892
Author(s):  
Sayema Chowdhury ◽  
Anupam Roy ◽  
Isaac Bodemann ◽  
Sanjay K. Banerjee
Keyword(s):  
Chemical Vapor Deposition ◽  
Transition Metal ◽  
Vapor Deposition ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Two Dimensional ◽  
Dimensional Growth

Heteroepitaxial Nucleation and Growth of Ge ON Si(100) Surfaces Using Remote Plasma Enhanced Chemical Vapor Deposition

1988 ◽  
Vol 116 ◽  
Author(s):  
R.A. Rudder ◽  
S.V. Hattangady ◽  
D.J. Vitkavage ◽  
R.J. Markunas
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Photoelectron Spectroscopy ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Layer By Layer ◽  
Heteroepitaxial Growth ◽  
Remote Plasma ◽  
Dimensional Growth ◽  
Diffraction Patterns

Heteroepitaxial growth of Ge on Si(100) has been accomplished using remote plasma enhanced chemical vapor deposition at 300*#x00B0;C. Reconstructed surfaces with diffraction patterns showing non-uniform intensity variations along the lengths of the integral order streaks are observed during the first 100 Å of deposit. This observation of an atomically rough surface during the initial stages of growth is an indication of three-dimensional growth. As the epitaxial growth proceeds, the diffraction patterns become uniform with extensive streaking on both the integral and fractional order streaks. Subsequent growth, therefore, takes place in a layer-by-layer, two-dimensional mode. X-ray photoelectron spectroscopy of the early nucleation stages, less than 80 Å, show that there is uniform coverage with no evidence of island formation.

Roles of salts in the chemical vapor deposition synthesis of two-dimensional transition metal chalcogenides

2020 ◽  
Vol 49 (30) ◽  
pp. 10319-10327 ◽  
Author(s):  
Chunyu Xie ◽  
Pengfei Yang ◽  
Yahuan Huan ◽  
Fangfang Cui ◽  
Yanfeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Transition Metal ◽  
Vapor Deposition ◽  
Transition Metal Dichalcogenides ◽  
Chemical Vapor ◽  
Metal Chalcogenides ◽  
Two Dimensional ◽  
Metal Dichalcogenides ◽  
Transition Metal Chalcogenides

This Frontier highlights the roles of added salts in the chemical vapor deposition synthesis of two-dimensional transition metal dichalcogenides.

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