Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD
2019 ◽
Vol 11
(43)
◽
pp. 40300-40309
◽
2020 ◽
Vol 8
(4)
◽
pp. 224-229
2010 ◽
Vol 138
(1)
◽
pp. 96-108
◽
2019 ◽
Vol 50
(1)
◽
pp. 516-519
◽
1994 ◽
Vol 106
(3)
◽
pp. 322-328
◽
1994 ◽
Vol 52
◽
pp. 700-701
Keyword(s):
1994 ◽
Vol 52
◽
pp. 550-551
2007 ◽
Vol 2007
◽
pp. 128-129
Keyword(s):