scholarly journals Surface Morphology and Electrical Properties of Cu3BTC2 Thin Films Before and After Reaction with TCNQ

2018 ◽  
Vol 10 (45) ◽  
pp. 39400-39410 ◽  
Author(s):  
Konrad Thürmer ◽  
Christian Schneider ◽  
Vitalie Stavila ◽  
Raymond W. Friddle ◽  
François Léonard ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Surface Morphology ◽  
Before And After

Reactive Ion Etching Damage to Ferroelectric Thin Films Capacitors

1994 ◽  
Vol 361 ◽  
Author(s):  
W. Pan ◽  
C.L. Thio ◽  
S.B. Desu ◽  
Cheewon Chung
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Leakage Current ◽  
Reactive Ion Etching ◽  
Ferroelectric Thin Films ◽  
Electric Properties ◽  
Etching Time ◽  
Ion Etching ◽  
Before And After ◽  
Ferroelectric Capacitors

ABSTRACTReactive ion etching damage to sputtered Pt/PZT/Pt ferroelectric capacitors was studied using Ar and CHCIFCF3 etch gases. Electrical properties, hysteresis, fatigue, and leakage current of PZT capacitors, before and after etching, were compared to examine the etching damage. It is found that the damage effects depend on etching time and are mainly due to the physical bombardment effect. The PZT capacitors etched with CHCIFCF3 plasma showed less damage than those etched in Ar plasma. The electric properties of etched Pt/PZT/Pt capacitors are recovered by annealing at 400 °C for 30min.

Influences of aluminum doping on the microstructures and electrical properties of tantalum nitride thin films before and after annealing

Vacuum ◽  
2021 ◽  
pp. 110791
Author(s):  
Kao-Yuan Wang ◽  
Ting-Chang Chang ◽  
Wen-Chung Chen ◽  
Yong-Ci Zhang ◽  
Yi-Ting Tseng ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Tantalum Nitride ◽  
Aluminum Doping ◽  
Before And After

Electrical Properties and Surface Morphology of SiOx-Pt Nano-Composite Thin Films

2010 ◽  
Vol 10 (2) ◽  
pp. 1111-1114
Author(s):  
S. K. Lim ◽  
I. S. Park ◽  
T. S. Kim ◽  
S. H. Na ◽  
J. S. Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Surface Morphology ◽  
Nano Composite ◽  
Composite Thin Films
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