scholarly journals High-Throughput Open-Air Plasma Activation of Metal-Oxide Thin Films with Low Thermal Budget

2018 ◽  
Vol 10 (43) ◽  
pp. 37223-37232 ◽  
Author(s):  
Young Jun Tak ◽  
Florian Hilt ◽  
Scott Keene ◽  
Won-Gi Kim ◽  
Reinhold H. Dauskardt ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
High Throughput ◽  
Air Plasma ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Thermal Budget ◽  
Plasma Activation ◽  
Low Thermal Budget

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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