Strong Influence of Humidity on Low-Temperature Thin-Film Fabrication via Metal Aqua Complex for High Performance Oxide Semiconductor Thin-Film Transistors

Keon-Hee Lim; Jae-Eun Huh; Jinwon Lee; Nam-Kwang Cho; Jun-woo Park; Bu-il Nam; Eungkyu Lee; Youn Sang Kim

doi:10.1021/acsami.6b11867

Strong Influence of Humidity on Low-Temperature Thin-Film Fabrication via Metal Aqua Complex for High Performance Oxide Semiconductor Thin-Film Transistors

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b11867 ◽

2016 ◽

Vol 9 (1) ◽

pp. 548-557 ◽

Cited By ~ 22

Author(s):

Keon-Hee Lim ◽

Jae-Eun Huh ◽

Jinwon Lee ◽

Nam-Kwang Cho ◽

Jun-woo Park ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

High Performance ◽

Strong Influence ◽

Oxide Semiconductor ◽

Aqua Complex ◽

Thin Film Fabrication ◽

Film Fabrication ◽

Semiconductor Thin Film

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Superconcentrated aqueous electrolyte and UV curable polymer composite as gate dielectric for high-performance oxide semiconductor thin-film transistors

Applied Physics Letters ◽

10.1063/1.5093741 ◽

2019 ◽

Vol 114 (17) ◽

pp. 172903 ◽

Cited By ~ 1

Author(s):

Eun Goo Lee ◽

Jintaek Park ◽

Sung-Eun Lee ◽

Junhee Lee ◽

Changik Im ◽

...

Keyword(s):

Thin Film ◽

Polymer Composite ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

Aqueous Electrolyte ◽

Oxide Semiconductor ◽

Uv Curable ◽

Semiconductor Thin Film

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Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.061401 ◽

2011 ◽

Vol 50 (6) ◽

pp. 061401

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.061401 ◽

2011 ◽

Vol 50 (6R) ◽

pp. 061401 ◽

Cited By ~ 1

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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High-Performance and Flexible Neodymium- Doped Oxide Semiconductor Thin-Film Transistors With Copper Alloy Bottom-Gate Electrode

IEEE Electron Device Letters ◽

10.1109/led.2018.2823304 ◽

2018 ◽

Vol 39 (6) ◽

pp. 839-842 ◽

Cited By ~ 3

Author(s):

Kuankuan Lu ◽

Rihui Yao ◽

Shiben Hu ◽

Xianzhe Liu ◽

Jinglin Wei ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Copper Alloy ◽

High Performance ◽

Oxide Semiconductor ◽

Gate Electrode ◽

Semiconductor Thin Film ◽

Bottom Gate ◽

Doped Oxide

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Compositional Engineering of Hf‐Doped InZnSnO Films for High‐Performance and Stability Amorphous Oxide Semiconductor Thin Film Transistors

Advanced Electronic Materials ◽

10.1002/aelm.202001216 ◽

2021 ◽

pp. 2001216

Author(s):

Jin‐Hyeok Park ◽

Hae‐Jun Seok ◽

Chan‐Hwi Kim ◽

Sung Hyeon Jung ◽

Hyung Koun Cho ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Oxide Semiconductor ◽

Amorphous Oxide ◽

Amorphous Oxide Semiconductor ◽

Semiconductor Thin Film

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Large-area (64 × 64 array) inkjet-printed high-performance metal oxide bilayer heterojunction thin film transistors and n-metal-oxide-semiconductor (NMOS) inverters

Journal of Material Science and Technology ◽

10.1016/j.jmst.2021.01.003 ◽

2021 ◽

Author(s):

Shuangshuang Shao ◽

Kun Liang ◽

Xinxing Li ◽

Jinfeng Zhang ◽

Chuan Liu ◽

...

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistors ◽

High Performance ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Large Area

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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Multifunctional Oxygen Scavenger Layer for High-Performance Oxide Thin-Film Transistors with Low-Temperature Processing

ACS Applied Materials & Interfaces ◽

10.1021/acsami.1c05565 ◽

2021 ◽

Author(s):

Min Seong Kim ◽

Hyung Tae Kim ◽

Hyukjoon Yoo ◽

Dong Hyun Choi ◽

Jeong Woo Park ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

High Performance ◽

Oxide Thin Film ◽

Oxygen Scavenger ◽

Low Temperature Processing

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High-performance dual-layer channel indium gallium zinc oxide thin-film transistors fabricated in different oxygen contents at low temperature

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.04ef07 ◽

2014 ◽

Vol 53 (4S) ◽

pp. 04EF07 ◽

Cited By ~ 15

Author(s):

Yu Tian ◽

Dedong Han ◽

Suoming Zhang ◽

Fuqing Huang ◽

Dongfang Shan ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Low Temperature ◽

Thin Film Transistors ◽

High Performance ◽

Oxide Thin Film ◽

Indium Gallium Zinc Oxide ◽

Zinc Oxide Thin Film ◽

Indium Gallium

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Hybridization of a low-temperature processable polyimide gate insulator for high performance pentacene thin-film transistors

Organic Electronics ◽

10.1016/j.orgel.2008.05.003 ◽

2008 ◽

Vol 9 (5) ◽

pp. 711-720 ◽

Cited By ~ 30

Author(s):

Taek Ahn ◽

Jin Woo Kim ◽

Yoojeong Choi ◽

Mi Hye Yi

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

High Performance ◽

Gate Insulator

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