Environmentally Assisted Cracking in Silicon Nitride Barrier Films on Poly(ethylene terephthalate) Substrates

2016 ◽  
Vol 8 (40) ◽  
pp. 27169-27178 ◽  
Author(s):  
Kyungjin Kim ◽  
Hao Luo ◽  
Ankit K. Singh ◽  
Ting Zhu ◽  
Samuel Graham ◽  
...  
2011 ◽  
Vol 284-286 ◽  
pp. 48-52 ◽  
Author(s):  
Zhuang Liu ◽  
Lin Zhu ◽  
Jing Lin ◽  
Zhi Hui Sun

SiOx barrier films were deposited on poly (ethylene terephthalate) (PET) by radio frequency (RF) magnetron co-sputtering with double targets. The films deposited by co-sputtering were denser and smoother because different energy particles sputtering from double targets grew small islands to weaken shadowing effect which greatly reduce the interval gaps. The water vapor and oxygen transmission of SiOx films deposited by co-sputtering decreased to 0.31 cc/m2/day, 0.27 g/m2/24h respectively.


2020 ◽  
Vol 12 (3) ◽  
pp. 03007-1-03007-8
Author(s):  
N. P. Klochko ◽  
◽  
K. S. Klepikova ◽  
D. O. Zhadan ◽  
V. R. Kopach ◽  
...  

2000 ◽  
Vol 49 (2) ◽  
pp. 203-208 ◽  
Author(s):  
Ruxandra F Rosu ◽  
Robert A Shanks ◽  
Sati N Bhattacharya

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