High-Resolution Lithographic Patterning with Organotin Films: Role of CO2 in Differential Dissolution Rates
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1998 ◽
Vol 38
(6)
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pp. 1027
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1999 ◽
Vol 106
(8)
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pp. 863-867
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2011 ◽
Vol 106
(1-2)
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pp. 153-169
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2016 ◽
Vol 125
(3)
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pp. 475-498
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