GeSn/SiO2 Multilayers by Magnetron Sputtering Deposition for Short-Wave Infrared Photonics

2020 ◽  
Vol 12 (50) ◽  
pp. 56161-56171
Author(s):  
Adrian Slav ◽  
Ioana Dascalescu ◽  
Ana-Maria Lepadatu ◽  
Catalin Palade ◽  
Nicolae C. Zoita ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Short Wave ◽  
Sputtering Deposition ◽  
Short Wave Infrared

GeSn Nanocrystals in GeSnSiO2 by Magnetron Sputtering for Short-Wave Infrared Detection

2019 ◽  
Vol 2 (6) ◽  
pp. 3626-3635 ◽  
Author(s):  
Adrian Slav ◽  
Catalin Palade ◽  
Constantin Logofatu ◽  
Ioana Dascalescu ◽  
Ana M. Lepadatu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Short Wave ◽  
Infrared Detection ◽  
Short Wave Infrared

scholarly journals Nanocrystallized Ge-Rich SiGe-HfO2 Highly Photosensitive in Short-Wave Infrared

Materials ◽  
2021 ◽  
Vol 14 (22) ◽  
pp. 7040
Author(s):  
Catalin Palade ◽  
Ana-Maria Lepadatu ◽  
Adrian Slav ◽  
Valentin Serban Teodorescu ◽  
Toma Stoica ◽  
...  
Keyword(s):  
Monoclinic Phase ◽  
High Efficiency ◽  
Quantum Confinement Effect ◽  
Short Wave ◽  
Fast Diffusion ◽  
X Ray Diffraction ◽  
Sputtering Deposition ◽  
Si Photonics ◽  
Transmission Electron ◽  
Short Wave Infrared

Group IV nanocrystals (NCs), in particular from the Si–Ge system, are of high interest for Si photonics applications. Ge-rich SiGe NCs embedded in nanocrystallized HfO2 were obtained by magnetron sputtering deposition followed by rapid thermal annealing at 600 °C for nanostructuring. The complex characterization of morphology and crystalline structure by X-ray diffraction, μ-Raman spectroscopy, and cross-section transmission electron microscopy evidenced the formation of Ge-rich SiGe NCs (3–7 nm diameter) in a matrix of nanocrystallized HfO2. For avoiding the fast diffusion of Ge, the layer containing SiGe NCs was cladded by very thin top and bottom pure HfO2 layers. Nanocrystallized HfO2 with tetragonal/orthorhombic structure was revealed beside the monoclinic phase in both buffer HfO2 and SiGe NCs–HfO2 layers. In the top part, the film is mainly crystallized in the monoclinic phase. High efficiency of the photocurrent was obtained in a broad spectral range of curves of 600–2000 nm at low temperatures. The high-quality SiGe NC/HfO2 matrix interface together with the strain induced in SiGe NCs by nanocrystallization of both HfO2 matrix and SiGe nanoparticles explain the unexpectedly extended photoelectric sensitivity in short-wave infrared up to about 2000 nm that is more than the sensitivity limit for Ge, in spite of the increase of bandgap by well-known quantum confinement effect in SiGe NCs.

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron

scholarly journals Evaporated Se x Te 1‐ x Thin Films with Tunable Bandgaps for Short‐Wave Infrared Photodetectors

2020 ◽  
Vol 32 (38) ◽  
pp. 2001329 ◽  
Author(s):  
Chaoliang Tan ◽  
Matin Amani ◽  
Chunsong Zhao ◽  
Mark Hettick ◽  
Xiaohui Song ◽  
...  
Keyword(s):  
Thin Films ◽  
Short Wave ◽  
Infrared Photodetectors ◽  
Short Wave Infrared

scholarly journals Quantum magneto transport properties of nanostructure multi quantum wells short wave Infrared detectors

2021 ◽  
Vol 1743 ◽  
pp. 012009
Author(s):  
Merieme Benaadad ◽  
Abdelhakim Nafidi ◽  
Samir Melkoud ◽  
Driss Barkissy ◽  
Nassima Benchtaber
Keyword(s):  
Quantum Wells ◽  
Transport Properties ◽  
Infrared Detectors ◽  
Short Wave ◽  
Short Wave Infrared

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

CO2 retrieval model and analysis in short-wave infrared spectrum

Optik ◽  
2016 ◽  
Vol 127 (10) ◽  
pp. 4422-4425 ◽  
Author(s):  
Yanfen Li ◽  
Chunmin Zhang ◽  
Dongdong Liu ◽  
Jie Chen ◽  
Piao Rong ◽  
...  
Keyword(s):  
Infrared Spectrum ◽  
Short Wave ◽  
Retrieval Model ◽  
Short Wave Infrared
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