High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors

Matthew R. Henry; Songkil Kim; Andrei G. Fedorov

doi:10.1021/acs.jpcc.5b11488

High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.5b11488 ◽

2016 ◽

Vol 120 (19) ◽

pp. 10584-10590 ◽

Cited By ~ 16

Author(s):

Matthew R. Henry ◽

Songkil Kim ◽

Andrei G. Fedorov

Keyword(s):

Electron Beam ◽

High Purity ◽

Supersonic Jet ◽

Carrier Gas ◽

Electron Beam Induced Deposition ◽

Organometallic Precursors

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High-purity 3D nano-objects grown by focused-electron-beam induced deposition

Nanotechnology ◽

10.1088/0957-4484/27/35/355301 ◽

2016 ◽

Vol 27 (35) ◽

pp. 355301 ◽

Cited By ~ 25

Author(s):

Rosa Córdoba ◽

Nidhi Sharma ◽

Sebastian Kölling ◽

Paul M Koenraad ◽

Bert Koopmans

Keyword(s):

Electron Beam ◽

High Purity ◽

Electron Beam Induced Deposition

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High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current

Microelectronic Engineering ◽

10.1016/j.mee.2009.11.027 ◽

2010 ◽

Vol 87 (5-8) ◽

pp. 1550-1553 ◽

Cited By ~ 55

Author(s):

R. Córdoba ◽

J. Sesé ◽

J.M. De Teresa ◽

M.R. Ibarra

Keyword(s):

Electron Beam ◽

High Purity ◽

Electron Beam Induced Deposition ◽

Cobalt Nanostructures

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Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

Journal of Applied Physics ◽

10.1063/1.3431351 ◽

2010 ◽

Vol 107 (11) ◽

pp. 116102 ◽

Cited By ~ 57

Author(s):

A. J. M. Mackus ◽

J. J. L. Mulders ◽

M. C. M. van de Sanden ◽

W. M. M. Kessels

Keyword(s):

Electron Beam ◽

Atomic Layer Deposition ◽

High Purity ◽

Atomic Layer ◽

Layer Deposition ◽

Electron Beam Induced Deposition ◽

Local Deposition

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Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

Coordination Chemistry Reviews ◽

10.1016/j.ccr.2021.213851 ◽

2022 ◽

pp. 213851

Author(s):

I. Utke ◽

P. Swiderek ◽

K. Höflich ◽

K. Madajska ◽

J. Jurczyk ◽

...

Keyword(s):

Electron Beam ◽

Atomic Layer Deposition ◽

Gas Phase ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Atomic Layer ◽

Layer Deposition ◽

Electron Beam Induced Deposition ◽

Organometallic Precursors

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High-Purity Copper Structures from a Perfluorinated Copper Carboxylate Using Focused Electron Beam Induced Deposition and Post-Purification

ACS Applied Electronic Materials ◽

10.1021/acsaelm.0c00282 ◽

2020 ◽

Vol 2 (7) ◽

pp. 1989-1996

Author(s):

Luisa Berger ◽

Jakub Jurczyk ◽

Katarzyna Madajska ◽

Thomas Edward James Edwards ◽

Iwona Szymańska ◽

...

Keyword(s):

Electron Beam ◽

High Purity ◽

Electron Beam Induced Deposition ◽

Purity Copper

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Towards a single step process to create high purity gold structures by electron beam induced deposition at room temperature

Nanotechnology ◽

10.1088/0957-4484/27/41/415301 ◽

2016 ◽

Vol 27 (41) ◽

pp. 415301 ◽

Cited By ~ 6

Author(s):

C Mansilla ◽

S Mehendale ◽

J J L Mulders ◽

P H F Trompenaars

Keyword(s):

Electron Beam ◽

High Purity ◽

Room Temperature ◽

Single Step ◽

Step Process ◽

Electron Beam Induced Deposition

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Microstructural analysis and Transport Properties of MoO and MoC nanostructures prepared by focused electron beam-induced deposition

Scientific Reports ◽

10.1038/srep05740 ◽

2014 ◽

Vol 4 (1) ◽

Cited By ~ 12

Author(s):

Kazumasa Makise ◽

Kazutaka Mitsuishi ◽

Masayuki Shimojo ◽

Bunju Shinozaki

Keyword(s):

Electron Beam ◽

Transport Properties ◽

Microstructural Analysis ◽

Electron Beam Induced Deposition

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How the absorption-band intensities in high-purity quartz glasses depend on the electron-beam fluence

Journal of Optical Technology ◽

10.1364/jot.78.000341 ◽

2011 ◽

Vol 78 (5) ◽

pp. 341 ◽

Cited By ~ 1

Author(s):

A. P. Sergeev ◽

P. B. Sergeev

Keyword(s):

Electron Beam ◽

Absorption Band ◽

High Purity ◽

Quartz Glasses

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Annealing effect of platinum-incorporated nanowires created by focused ion/electron-beam-induced deposition

Chinese Physics B ◽

10.1088/1674-1056/23/8/088111 ◽

2014 ◽

Vol 23 (8) ◽

pp. 088111 ◽

Cited By ~ 5

Author(s):

Jing-Yue Fang ◽

Shi-Qiao Qin ◽

Xue-Ao Zhang ◽

Dong-Qing Liu ◽

Sheng-Li Chang

Keyword(s):

Electron Beam ◽

Annealing Effect ◽

Electron Beam Induced Deposition

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Synthesis of Nanostructures using Electron Beam Induced Deposition

Microscopy and Microanalysis ◽

10.1017/s1431927608084511 ◽

2008 ◽

Vol 14 (S2) ◽

pp. 242-243

Author(s):

P Kruit ◽

W van Dorp ◽

K Hagen ◽

PA Crozier

Keyword(s):

Electron Beam ◽

New Mexico ◽

Electron Beam Induced Deposition ◽

Synthesis Of Nanostructures

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

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