scholarly journals A Review on Lithium Phosphorus Oxynitride

2021 ◽  
Vol 125 (7) ◽  
pp. 3651-3667
Author(s):  
Jed D. LaCoste ◽  
Andriy Zakutayev ◽  
Ling Fei
Keyword(s):  
Lithium Phosphorus Oxynitride

A step towards understanding the beneficial influence of a LIPON-based artificial SEI on silicon thin film anodes in lithium-ion batteries

Nanoscale ◽  
2018 ◽  
Vol 10 (4) ◽  
pp. 2128-2137 ◽  
Author(s):  
A. Reyes Jiménez ◽  
R. Nölle ◽  
R. Wagner ◽  
J. Hüsker ◽  
M. Kolek ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrochemical Performance ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Silicon Thin Film ◽  
Sei Layer ◽  
Thin Film Electrodes ◽  
Lithium Phosphorus Oxynitride

The influence of lithium phosphorus oxynitride (LIPON) as an “artificial SEI layer” on the electrochemical performance of silicon thin film electrodes.

scholarly journals Local Structure of Glassy Lithium Phosphorus Oxynitride Thin Films: A Combined Experimental and Ab Initio Approach

2020 ◽  
Vol 59 (49) ◽  
pp. 22185-22193
Author(s):  
Maxwell A. T. Marple ◽  
Thomas A. Wynn ◽  
Diyi Cheng ◽  
Ryosuke Shimizu ◽  
Harris E. Mason ◽  
...  
Keyword(s):  
Thin Films ◽  
Ab Initio ◽  
Local Structure ◽  
Lithium Phosphorus Oxynitride ◽  
Ab Initio Approach

Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries

2010 ◽  
Vol 25 (8) ◽  
pp. 1507-1515 ◽  
Author(s):  
Fan Xu ◽  
Nancy J. Dudney ◽  
Gabriel M. Veith ◽  
Yoongu Kim ◽  
Can Erdonmez ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Deposition ◽  
3D Structures ◽  
Thin Film Electrolyte ◽  
Axis Alignment ◽  
Film Electrolyte ◽  
Lithium Phosphorus Oxynitride ◽  
Planar Substrates ◽  
3D Solid ◽  
Lipon Film

The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10–100 μm arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 ± 1 μS/cm.

scholarly journals Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

2019 ◽  
Vol 3 (2) ◽  
pp. 174-182
Author(s):  
B. Uzakbaiuly ◽  
A. Mukanova ◽  
I. Kurmanbayeva ◽  
Z.B. Bakenov
Keyword(s):  
Thin Film ◽  
Deposition Parameters ◽  
Lithium Phosphorus Oxynitride
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