Determination of Main and Minor Components of Silicon Based Materials by a Combustion with Elemental Fluorine. Separation of Gaseous Fluorination Products by Carrier Gas Distillation and Gas Mass Spectrometry

2000 ◽  
Vol 72 (16) ◽  
pp. 3875-3880 ◽  
Author(s):  
Katrin Russe ◽  
Heinrich Kipphardt ◽  
José A. C. Broekaert
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