Critical evaluation of the Karl Fischer water method, end-point detection system, and standardization

1972 ◽  
Vol 44 (11) ◽  
pp. 1833-1840 ◽  
Author(s):  
Thomas H. Beasley ◽  
Howard W. Ziegler ◽  
Richard L. Charles ◽  
Perry. King
2017 ◽  
Vol 739 ◽  
pp. 75-80 ◽  
Author(s):  
Hong Kai Li ◽  
Tong Qing Wang ◽  
De Wen Zhao ◽  
Jian Bin Luo ◽  
Xin Chun Lu

Accurate determination of a chemical mechanical planarization (CMP) process reaching the end point is an important problem in the CMP process. In present work, the variation of the motor power signal of the polishing platen in the CMP process has been investigated, and the moving average method with 121-points moving window was used to smooth the original signal curve. Experiment results showed that the processed signal could facilitate the extraction of end-point feature for the in-situ end-point detection (EPD) system and it was relatively steady before and after the layer transition stage, which made it more reliable to detect the end point in situ. Comparing with other EPD methods, the system was less complicated, and it was easier to code for algorithm development. Finally, further analysis was performed and series of experiments provided a planarized via-revealed surface with low via dishing.


1969 ◽  
Vol 52 (3) ◽  
pp. 569-577
Author(s):  
Donald E Jordan ◽  
Jack L Hoyt

Abstract In the described method, water in phosphoric acid is determined by in situ coulometric generation of Karl Fischer reagent with automated end point detection. The variables associated with visual end point detection among different operators are eliminated. Sample size is limited by the generation rate of available coulometers and is 50 mg for samples containing more than 20% water and 100 t o 150 m g for samples containing less than 20% water for a 20 min analysis time . The precision at 99% confidence ranges from 0.43 ± 0.05% for superphosphoric acid to 36.8 ± 0.81% for untreated 10–34–0 base solution; for polished wet process phosphoric acid the precision is 16.49 ± 0.19% compared to 16.70 ± 0.64% by azeotropie distillation. The method is applicable in all systems which do not normally interfere with Karl Fischer reagent; the generating efficiency at the 100% water level is >99%. Coulometer power tube fatigue is the most serious limitation unless a careful check and replacement program is initiated.


Talanta ◽  
2021 ◽  
Vol 224 ◽  
pp. 121735
Author(s):  
Claudio Avila ◽  
Christos Mantzaridis ◽  
Joan Ferré ◽  
Rodrigo Rocha de Oliveira ◽  
Uula Kantojärvi ◽  
...  

1979 ◽  
Vol 25 (6) ◽  
pp. 973-975 ◽  
Author(s):  
T Chard ◽  
A Sykes

Abstract We describe an immunoassay for human choriomammo-tropin by use of the fluorescein-labeled hormone (of human origin). The technique is generally similar to the radioimmunoassay for this material, but has the advantage of stability of tracer and avoidance of radiation hazard. However, the procedure requires approximately 50-fold more tracer than does the radioimmunoassay, and this would be a disadvantage with materials for which supplies of purified antigen are scarce. Furthermore, both within-assay variation (3.9%) and between-assay variation (7.8--7.9%) were less satisfactory than that of radioimmunoassay (1.5% and 2.2--3%, respectively). This is almost certainly the result of imprecision of end-point detection and could probably be corrected by further attention to equipment design.


2005 ◽  
Vol 38 (1) ◽  
pp. 115-120
Author(s):  
Hilario López García ◽  
Iván Machón González

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