Sulfur trioxide permeation tube for calibration of sulfuric acid measurement methods

1979 ◽  
Vol 51 (14) ◽  
pp. 2388-2391 ◽  
Author(s):  
Russell N. Dietz ◽  
Robert F. Wieser
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Trioxide ◽  
Measurement Methods ◽  
Permeation Tube

Reaction of sulfur trioxide with water clusters and the formation of sulfuric acid

1984 ◽  
Vol 88 (15) ◽  
pp. 3329-3333 ◽  
Author(s):  
R. Hofmann-Sievert ◽  
A. W. Castleman
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Trioxide ◽  
Water Clusters

Exchange of comments: Measurement of sulfuric acid aerosol, sulfur trioxide, and the total sulfate content of the ambient air

1976 ◽  
Vol 48 (14) ◽  
pp. 2269-2270
Author(s):  
Philip W. West ◽  
Gary L. Lundquist ◽  
Ronnie L. Thomas ◽  
V. Dharmarajan
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Trioxide ◽  
Ambient Air ◽  
Sulfate Content ◽  
Total Sulfate

Novel Methods for Wet Stripping High Dose Implanted Photoresist Using Sulfur Trioxide

2009 ◽  
Vol 145-146 ◽  
pp. 281-284 ◽  
Author(s):  
Eric J. Bergman ◽  
J. Dusty Leonhard
Keyword(s):  
Hydrogen Peroxide ◽  
Sulfuric Acid ◽  
Elevated Temperature ◽  
Ion Implantation ◽  
Sulfur Trioxide ◽  
Surface Roughening ◽  
High Dose ◽  
Device Performance ◽  
Hot Electron ◽  
Hot Electron Injection

Ion implantation is one of many critical processes in the fabrication of semiconductor devices. While device geometries have been shrinking, the implant dose has typically been increasing. Historically, photoresist removal has been achieved through a combination of plasma “ashing” and a subsequent wet clean, often using a mixture of sulfuric acid and hydrogen peroxide at elevated temperature. The “piranha” or SPM strip is often followed by an ammonia based clean such as APM to remove particles and sulfate residues from the device. However, device constraints are presently having difficulty accommodating the film loss, surface roughening, high molecular temperatures and hot electron injection which may accompany a plasma ash. [1] The APM clean is also having to undergo modification in order to minimize oxide loss which would adversely affect device performance.

Cold End Corrosion Avoiding by Using a New Type of Air Combustion Pre-Heater

2017 ◽  
Vol 907 ◽  
pp. 157-163 ◽  
Author(s):  
Maria Cristiana Enescu ◽  
C. Marius Vlădulescu ◽  
Aurel Gaba ◽  
Vasile Bratu ◽  
Elena Valentina Stoian ◽  
...  
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Dioxide ◽  
Computer Program ◽  
Skin Temperature ◽  
Fuel Economy ◽  
Flue Gas ◽  
Heat Recovery ◽  
Sulfur Trioxide ◽  
Dew Point ◽  
New Type

This paper analyzes the possibility of reducing the cold end corrosion in boilers and furnaces by using a new type of air combustion pre-heater. Cold end corrosion appears due to catalytic oxidation of the sulfur dioxide to sulfur trioxide and then due to the sulfuric acid condensation at dew point. Calculating dew points of various acid gases and options for reducing cold end corrosion of heat recovery exchangers are presented. For avoiding the cold end corrosion we design a new type of air combustion pre-heater for boilers and furnaces. Also, the tube skin temperature of the first row of pipes of the actual air pre-heater was simulated with this computer program, in order to determine whether this temperature is lower than acid dew point of flue gas. With the simulation for this configuration of the actual combustion air pre-heater, the skin temperature for the first row (for the combustion air flow) of tubes from the upper bundle was TS = 134 °C. A way to reduce the cold end corrosion in the combustion air pre-heaters is raising the temperature of the combustion air at the air pre-heater entrance. This solution involves taking a quantity of preheated air, recirculation and then reintroducing it in the air pre-heater. In the same time, this solution avoiding to use the steam radiator, mounted after the fan, for pre-heating the combustion air from 1°C to 45°C. Thus, the furnaces equipped with the new combustion air pre-heater and modern low NOx burners made a fuel economy about 3%.

Synthesis from Alkenes and Sulfur Trioxide or Other Sulfuric Acid Derivatives

2008 ◽  
pp. 1
Author(s):  
J. Drabowicz ◽  
P. Kiełbasiński ◽  
P. Łyżwa ◽  
A. Zając ◽  
M. Mikołajczyk
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Trioxide

Reaction of Alkanes with Sulfuric Acid, Sulfur Trioxide, and Derivatives

2008 ◽  
pp. 1
Author(s):  
J. Drabowicz ◽  
P. Kiełbasiński ◽  
P. Łyżwa ◽  
A. Zając ◽  
M. Mikołajczyk
Keyword(s):  
Sulfuric Acid ◽  
Sulfur Trioxide
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